Ceramic Targets | Specialize In Thin Film Materials | Xinkang Adavanced Materials

Ceramic Targets

XK supply high quality Al2O3, SiO2, Si3N4, SiC, Nb2Ox, TiOx, ITO, AZO sputtering targets, 
as well as many other compount sputtering targets. As ceramic sputtering targets are very fragile with very bad thermal conductivity, so usually it will be bonded with copper backing plate by indium, or elastomer, hence the targets' service time will be longer.
Sintering technology are used  to produce ceramic sputtering targets, the shape can be round and rectangle.For round target,the diameter can be 1" to 14" , while thickness can be 3mm to 6.35mm, special size can be customized. For rectangle target, monolithic or several tiles construction will be supplied depending on the size.
Our sputtering targets have such advantages:  uniform color, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants. 
Pls check the specifications as follows forms:   
Ceramic Target
Target Name Materials Purity Target Name Materials Purity
Aluminium Oxide Al2O3  99.99% Vanadium Oxide V2O5 99.90%
Barium Titanate BaTiO3 99.99% Yttrium Oxide Y2O3 99.99%
Hafnium Oxide HfO2 99.95% Zinc Oxide ZnO 99.99%
Zirconium Oxide ZrO2 99.95% ZnO/Al2O3 98/2wt% AZO  99.99%
Molybdenum Oxide MoO3 99.90% In2O3/SnO2 90/10wt% ITO 99.99%
Tungsten Trioxide WO3 99.90% In2O3/ZnO 90/10 IZO 99.99%
Nickel Oxide NiO 99.90% Ga2O3/ZnO GZO 99.99%
Silicon monoxide SiO 99.90% In2O3/Ga2O3/ZnO IGZO 99.99%
Silicon Dioxide SiO2 99.99% Yttrium Iron Garnet  YIG / Y3Fe5O12   99.99%
Cerium Oxide CeO2 99.99%  Lead Titanate  PbTiO3 99.95%
Chromium Oxide Cr2O3 99.90% Lead Zirconate PbZrO3 99.95%
Indium Oxide In2O3 99.99% Strontium Titanate SrTiO3 99.95%
Tin Oxide SnO2 99.99% barium titanate BaTiO3 99.95%
Magnesium Oxide MgO 99.99% Lithium Cobalt Oxides  LiCoO2 99.95%
Titanium Oxide TiO2 99.95% Lithium Manganate  LiMn2O4 99.95%
Niobium Oxide Nb2O5 99.95% Lithium Iron Phosphate LiFePO4 99.95%
Tantalum Oxide Ta2O5 99.95% Lithium Phosphate  Li3PO4 99.95%
Samarium Oxide Sm2O3 99.99% lanthanum manganate  LaMnO3 99.95%

Ceramic Target
Target Name Materials Purity Target Name Materials Purity
 Boron Carbide B4C 99.50%  Copper Sulphide CuS 99.90%
Silicon Carbide SiC 99.90% Tin Sulphide SnS 99.90%
Tungsten Carbide WC 99.90% Zinc Sulphide ZnS 99.90%
Aluminium Nitride AlN 99.50% Kesterite Cu2ZnSnS4 99.90%
Titanium Nitride TiN 99.50% Tungsten Sulfide WS2 99.90%
Silicon Nitride Si3N4 99.90% Molybdenum Sulfide MoS2 99.90%
Lanthanum Hexaboride LaB6 99.90% Magnesium Fluoride MgF2 99.99%

If the materials you demand are not listed out, it do not means we can't supply it, pls contact us sales engineer for checking.