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FeCoTaZr Sputtering Target

Iron alloy,sputtering target,s

Product Name

FeCoTaZr Sputtering Target

Element Symbol

Fe + Co + Ta + Zr



Availble Shape

Planar target



The flexibility of our production process allows to adjust the microstructure of our coating material to achieve your desired effect. If the grains of the sputtering target are uniformly aligned, the user can benefit from constant erosion rates and homogeneous layers. The picture below are two micrographs of our FeCoTaZr sputtering target, the average grain size<50μm.


The sputtering targets we produced are high purity, it’s most important benefits are that your films possess an outstanding level of electrical conductivity and minimized particle formation during the PVD process. Below forms are some history Certificate of analysis and PTF Certificate  for 3N5 high purity FeCoTaZr sputtering target
Analytical Methods: 1. Metallic elements were analyzed using ICP-OES. 2. Gas elements were analyzed using LECO. 

Significantly, our plant is also specialized in manufacturing various Iron based alloy sputtering targets, including Fe + Hf and Fe + Pt alloy sputtering targets, with customized alloy compositions, flexible dimension with closer tolerance, as well as uniform microstructure. If any of our products are interesting to you, please contact us without hesitating.

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