XK supply high quality Al2O3, SiO2, Si3N4, SiC, Nb2Ox, TiOx, ITO, AZO sputtering targets, as well as many other compount sputtering targets. As ceramic sputtering targets are very fragile with very bad thermal conductivity, so usually it will be bonded with copper backing plate by indium, or elastomer, hence the targets' service time will be longer.
Sintering technology are used to produce ceramic sputtering targets, the shape can be round and rectangle.For round target,the diameter can be 1" to 14" , while thickness can be 3mm to 6.35mm, special size can be customized. For rectangle target, monolithic or several tiles construction will be supplied depending on the size.
Our sputtering targets have such advantages: uniform color, smooth surface, no cracks, no chipping, no foreign inclusions and contaminants.
Pls check the specifications as follows forms:
If the materials you demand are not listed out, it do not means we can't supply it, pls contact us sales engineer for checking.