The rhodium sputtering target has the same performance as its raw material. Rhodium is a chemical element with the symbol Rh and atomic number 45. It is an ultra-rare, silvery-white, hard, corrosion-resistant, and chemically inert transition metal. It is a noble metal and a member of the platinum group.

Rhodium is a hard, silvery, durable metal that has a high reflectance. Rhodium metal does not normally form an oxide, even when heated. Oxygen is absorbed from the atmosphere only at the melting point of rhodium, but is released on solidification. Rhodium has both a higher melting point and lower density than platinum. It is not attacked by most acids: it is completely insoluble in nitric acid and dissolves slightly in aqua regia.

Because rhodium metal is inert against corrosion and most aggressive chemicals, and because of its rarity, rhodium sputtering targets is usually alloyed with platinum or palladium and applied in high-temperature and corrosion-resistive coatings.

Related Silver Alloy Sputtering Materials:
PtRh, PdRh alloy sputtering targets and evaporation materials