Xinkang can produce and supply full range of ceramic sputtering targets and compound targets, including oxide sputtering targets, carbide sputtering targets, fluoride sputtering targets, sulfide sputtering targets and so on. The production technology of ceramic sputtering targets are hot press. From the selection of raw materials to the control of temperature, pressure and time of hot press sintering, we strictly follow the specific production process, thus the finished ceramic sputtering targets have the characteristics of high purity, high density, uniform surface color without spots and crack, the end user can obtain constant erosion rates and high pure and homogeneous thin films during PVD process.
Cerium Oxide Sputtering Target
Purity: 99.9%,99.99%;
Production Method: hot press sintering
Available dimensions:
Circular: Diameter <= 14 inch, Thickness >= 3 mm;
Rectangular: Length <= 14 inch, Width <= 10 inch, Thickness >= 3 mm.
Type of Bond: Indium, Elastomer.